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DSMC model for rarefied gas thin film
Last Updated: 28 May 2011
People: Hung-Ling Yang, M.J. Chern
In order to figure out the dynamic behavior of the rarefied gas film, a 2-D numerical model using Direct Simulation Monte Carlo (DSMC) method is established to investigate the relationship of a quality factor with the high frequency and low pressure limit. The numerical results show that the quality factor is inversely proportional to gas pressure, but proportional to the vibrating frequency. For example, for the case of the vibrating plate with the characteristic frequency 43 KHz, gas damping suppresses the vibration of the plate, when the pressure is higher than 1 torr. However, as the pressure is decreased to 1 mtorr, the quality factor becomes 2000. In terms of the obtained results, it is believed that the in-house DSMC method can predict the behavior of a vibrating microstructure reasonably.
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Tel: (886)-2-2737-6496
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E-mail: mjchern@mail.ntust.edu.tw
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